3M™ Trizact™ CMP Pad

11  Products
  • Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
  • An innovative groove design helps provide efficient and uniform slurry flow distribution.
  • The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.
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Overall Diameter (Metric)
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 Overall Diameter (Metric)
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Details
  • Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
  • An innovative groove design helps provide efficient and uniform slurry flow distribution.
  • The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.

3M™ Trizact™ CMP Pad uses microreplication technology to help provide precise asperity control for low defectivity and consistent pad performance throughout pad life.

Specifications
Brand
Trizact™
Manufacturing Location
United States
Overall Diameter (Metric)
508 mm, 739.14 mm, 749.3 mm, 774.7 mm