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As semiconductor processing, flat panel display manufacturing and other high-tech industries move to smaller line widths, larger wafer sizes and advancing display technology, dissolved gas control is a critical consideration in ultra-pure water quality.
Because of their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are a widely used degassing technology in the semiconductor and flat panel display water treatment systems.
Unlike conventional vacuum towers these membrane degasser systems can be expanded. As water volume requirements grow or dissolved gas specifications get lower additional contactors can be added to a system to meet the changing needs.
3M Liqui-Cel Membrane Contactors also enable low concentrations and precision control of the dissolved gases in ultra-pure water and other compatible wet bench processes fluids.
3M™ Liqui-Cel™ Membrane Contactors provide efficient dissolved gas control in a compact design. Capable of adding gases to or removing dissolved gases and bubbles from compatible liquid streams, these gas transfer devices utilise hollow fiber membrane technology that may help facilities around the world improve operating efficiency, performance and protect product quality. They have displaced vacuum towers, forced draft deaerators, and oxygen scavengers around the world for over 20 years. 3M supports your projects with knowledgeable technical support and service by working collaboratively to ensure solutions meet requirements and expectations.
3M™ Liqui-Cel™ Membrane Contactors remove O₂ from water down to less than 1 ppb and dissolved CO₂ to 0.5 ppm. Low dissolved oxygen levels help protect product yields, while low CO₂ levels may help improve the efficiency of electrodionisation (EDI) and other ion exchange processes. Membrane contactors are compact, operate in-line and do not require chemicals in operation.
3M Liqui-Cel Membrane Contactors have displaced vacuum towers, forced draft deaerators, and oxygen scavengers around the world for over 20 years. 3M supports your projects with deep technical support and service by working collaboratively to ensure solutions meet requirements and expectations.
Electroplating solutions require both stringent particle and dissolved gas control to prevent defects and impurities in the deposited metal layer. 3M has both particle and dissolved gas solutions to meet the needs for your electroplating process.
3M Liqui-Cel Membrane Contactors are used in a variety of gas transfer applications to strip dissolved gases from aqueous fluids. In one specific use, ammonia gas is stripped off from feed waters with high ammonia content and is directly absorbed into a reactive acid solution.
This simultaneous removal and recovery of ammonia is possible in a single device. This process is called TMCS (Transmembrane Chemisorption). 3M Liqui-Cel Membrane Contactors are used in a variety of gas transfer applications to strip dissolved gases from aqueous fluids. In the Transmembrane Chemisorption (TMCS) process, ammonia gas is stripped from wastewater streams with a high concentration of ammonia, diffuses across the wall of a hollow fiber membrane, and is directly absorbed into a reactive acid solution. This makes simultaneous removal and recovery of ammonia possible in a single device.
The most widely known application for 3M™ Liqui-Cel™ Membrane Contactors is efficient removal of dissolved gasses such as oxygen from ultrapure water to extremely low levels. The microporous membrane in 3M Liqui-Cel Membrane Contactors is also efficient at adding pure gases and custom gas mixtures back to UPW. Sometimes referred to as “functional water”, small yet precise amounts of gases such as CO₂, NH₃, N₂ and H₂ can be added to ultrapure water to adjust conductivity levels or to help enhance the cleaning efficiency of UPW in various manufacturing steps.
3M Liqui-Cel Membrane Contactors allow for automated, precise gas addition control while avoiding bubble formation and with little or no waste.
Find more information for reliable and cost-effective filtration solutions for your microelectronics manufacturing operation.