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fluorothermoplastics for semiconductor fluid handling equipment

High-purity semiconductor fluid handling to protect your process flow

CONTACT AN EXPERT

High purity fluorothermoplastics for semiconductor fluid handling equipment

As the industry demands more complex chip design to power next-generation technologies including 5G devices, the need to maintain process purity becomes more critical than ever.

  • When you choose 3M™ Dyneon™ Fluorothermoplastics, you get materials with the right mix of properties to help meet the demands of many of your critical semiconductor applications.  Our Ultra High Purity (UHP) PFA products can be a key raw material component for you to meet today's stringent extractable contamination limits. What's more, we recognize how vital consistency and dependable performance is for your materials sourcing. We are investing with a vision to continue to produce world class purity for your semiconductor fluid handling equipment – helping you reduce costly downtime and waste.

  • high purity fluorothermoplastics

    Reliable material properties backed by 3M materials science

    Our 3M™ Dyneon™ Fluorothermoplastics materials are backed by decades of experience in fluoropolymer design and manufacturing and shaped by our longstanding commitment to the semiconductor industry. At 3M, we are dedicated to support leading edge semiconductor fabrication with PTFE and high purity PFA materials for reliable and consistent performance across your facility, including fluid handling systems, temperature and chemical resistance. Additionally, participation in standard setting task forces is one of our key strategies to help raise the industry at large, as well as ourselves, to meet the ever evolving and more stringent challenges of the future.


Chemical Delivery Systems

Your production process comes with unique fluid handling challenges, including the presence of harsh cleaning and etching chemicals, high heat, or the need to handle ultra-pure water. Our fluorothermoplastics are engineered to withstand the toughest conditions while maintaining purity and integrity.

  • Basic shapes and profiles

    3M™ Dyneon™ PFA can be extruded or injection molded to manufacture parts such as:
     

    • Tubing
    • Pumps
    • Valves
    • Sheets
    • Films
  • Semifinished goods

    3M™ Dyneon™ PTFE is best suited for manufacturing compression molded parts such as:
     

    • Etch basins
    • Wafer carriers
    • Cleaning basins
    • Diaphragm pumps
    • Gaskets
    • Pipe lining and fittings
    • Filters

3M™ Dyneon™ Fluorothermoplastics

3M™ Dyneon™ Fluorothermoplastic materials are suitable for a variety of uses across your facility, from wafer carriers, etch basins, fluid handling systems and more.

3M™ Dyneon™ PFA
  • 3M™ Dyneon™ PFA
    • Highest purity for tubing applications
    • Exceptional temperature resistance
    • Excellent chemical resistance
    • Exceptional surface smoothness
3M™ Dyneon™ FLEX PFA
  • 3M™ Dyneon™ FLEX PFA
    • Exact benefits of UHP PFA with these extended benefits
    • Ultra-smooth surface to promote good flow
    • High stress crack resistance
3M™ Dyneon™ PTFE
  • 3M™ Dyneon™ PTFE
    • Universal chemical resistance
    • Wide service temperature range
    • Low coefficient of friction
    • Low permeability
    • Long service life
3M™ Dyneon™ TFM™ PTFE
  • 3M™ Dyneon™ TFM™ PTFE
    • Unique chemistry with increased density polymer structure enabling substantially lower deformation under load and lower permeability
    • Exceptionally smooth surfaces
    • Helps extend equipment life

Connect with a 3M expert.

Need help with a tough materials challenge? Get in touch with us today for product, technical or application advice or if you want to collaborate with a 3M Technical Specialist.