- Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
- An innovative groove design helps provide efficient and uniform slurry flow distribution.
- The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.
Details
- Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
- An innovative groove design helps provide efficient and uniform slurry flow distribution.
- The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.
3M™ Trizact™ CMP Pad uses microreplication technology to help provide precise asperity control for low defectivity and consistent pad performance throughout pad life.
Specifications
|
|
|
|---|---|
|
Brand
|
Trizact™
|
|
Manufacturing Location
|
United States
|
|
Overall Diameter (Metric)
|
739.14 mm
|
Resources
Data Sheets
