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  6. 3M™ Trizact™ CMP Pad MR665L, 30.5 in diameter

3M™ Trizact™ CMP Pad MR665L, 30.5 in diameter

3M ID 7100180524
  • Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
  • An innovative groove design helps provide efficient and uniform slurry flow distribution.
  • The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.
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Details
  • Precisely engineered three-dimensional microreplicated asperities and pores, helps to ensure uniform asperity diameter and height and pore depth.
  • An innovative groove design helps provide efficient and uniform slurry flow distribution.
  • The controlled microreplicated features helps ensure consistent performance pad-to-pad to meet the demands of advanced node CMP processes.

3M™ Trizact™ CMP Pad MR665L, 30.5 inch diam uses microreplication technology to provide precise asperity control for low defectivity and consistent pad performance throughout pad life.

Specifications
Brand
Trizact™
Manufacturing Location
United States
Overall Diameter (Metric)
774.7 mm