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  6. 3M™ Diamond Pad Conditioner A165 Snap-On, 4.25 in dia

3M™ Diamond Pad Conditioner A165 Snap-On, 4.25 in dia

3M ID 60020012500
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Exclusive polymer substrate enhances corrosion resistance
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Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Exclusive polymer substrate enhances corrosion resistance

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

Specifications
Abrasive Material
Nickel based alloy with patterned diamond
Abrasive Working Surface
Full Face
Aggressiveness
15-19
Application
CMP
Carrier Color
Grey
Carrier Format
Disk - with bevel edge, snap-on
Carrier Size
4.25 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, STI Process, W (bulk)
Diamond Size
251 um
Diamond Type
Type 4, semi-sharp
Manufacturing Location
United States
Product Series
A165
Product Type
Diamond Pad Conditioner