3M™ Diamond Pad Conditioner C123, 4 in dia

3M ID 60020014571
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
  • Exclusive polymer substrate enhances corrosion resistance
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Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
  • Exclusive polymer substrate enhances corrosion resistance

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

Specifications
Abrasive Material
Nickel based alloy with patterned diamond
Abrasive Working Surface
Full Face
Aggressiveness
9-16
Application
CMP
Brand
3M™
Carrier Color
Grey
Carrier Format
Disk
Carrier Material
410 Stainless Steel
Carrier Size
4.00 inch diameter
Carrier Substrate
410 SS
CMP Process
Cu (bulk), PMD/ILD, STI Process, W (bulk)
Diamond Size
151 um
Diamond Type
Type 3, semi blocky
Manufacturing Location
United States
Product Series
C123
Product Type
Diamond Pad Conditioner