- 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
- Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
- Metal-free composition is ideal advanced node processes sensitive to contamination
- Outstanding disk-to-disk consistency for predictive performance
Details
- 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
- Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
- Metal-free composition is ideal advanced node processes sensitive to contamination
- Outstanding disk-to-disk consistency for predictive performance
3M™ Trizact™ Pad Conditioners deliver precision, consistency and reliability to semiconductor chemical mechanical polishing (CMP). Diamond-coated ceramic construction is ideal for manufacturing to micro-scale specifications, as well as exceptionally smooth pad surface finishes without tiny scratches commonly caused by diamond grit abrasives.
Specifications
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|---|---|
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Abrasive Material
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CVD coated ceramic
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Abrasive Working Surface
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B5-M990 Pattern
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Application
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CMP
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Brand
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Trizact™
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Carrier Material
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Stainless Steel
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Product Series
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B5-M990
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Product Type
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Diamond Pad Conditioner
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Resources
