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  6. 3M™ Diamond Pad Conditioner Ring E3921, 360 mm Diameter

3M™ Diamond Pad Conditioner Ring E3921, 360 mm Diameter

3M ID 60020020917
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life
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Details
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

Specifications
Abrasive Material
Nickel based alloy with patterned diamond
Abrasive Working Surface
Segmented
Application
CMP
Carrier Color
Grey
Carrier Format
Ring
Carrier Size
14.17 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, W (bulk)
Diamond Size
251 um
Diamond Type
Type 8, sharp
Manufacturing Location
United States
Product Series
E3921