3M™ CMP Pad Conditioner Brush PB32A-1, 4.25-in dia

3M ID 60020020792
  • Exclusive polymer substrate enhances corrosion resistance
  • Durable brush bristles assist with removal of pad debris from porometric and felt-based pads
  • Easy connection to polishing tool end effector
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Details
  • Exclusive polymer substrate enhances corrosion resistance
  • Durable brush bristles assist with removal of pad debris from porometric and felt-based pads
  • Easy connection to polishing tool end effector

Engineered CMP pad brushes are designed for critical semiconductor buff CMP applications.

Specifications
Abrasive Material
Nylon Fibers
Abrasive Working Surface
Full Face
Application
CMP
Brand
3M™
Bristle Diameter
0.005 in
Brush Material-Density
Nylon, >2000/sq in
Carrier Color
Black
Carrier Format
Disk
Carrier Material
Polycarbonate
Carrier Size
4.25 inch diameter
Carrier Substrate
Polycarbonate
CMP Process
Cu (barrier), Final Buff, W (buff)
Manufacturing Location
United States
Product Series
PB32A
Product Type
Pad Conditioner Brush